JPS63185444U - - Google Patents
Info
- Publication number
- JPS63185444U JPS63185444U JP7598987U JP7598987U JPS63185444U JP S63185444 U JPS63185444 U JP S63185444U JP 7598987 U JP7598987 U JP 7598987U JP 7598987 U JP7598987 U JP 7598987U JP S63185444 U JPS63185444 U JP S63185444U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- sample
- vacuum
- sample stage
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7598987U JPS63185444U (en]) | 1987-05-22 | 1987-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7598987U JPS63185444U (en]) | 1987-05-22 | 1987-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185444U true JPS63185444U (en]) | 1988-11-29 |
Family
ID=30922650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7598987U Pending JPS63185444U (en]) | 1987-05-22 | 1987-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185444U (en]) |
-
1987
- 1987-05-22 JP JP7598987U patent/JPS63185444U/ja active Pending
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